Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
No abstract available.
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008