Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
The generalized Pareto distribution is a two-parameter distribution that contains uniform, exponential, and Pareto distributions as special cases. It has applications in a number of fields, including reliability studies and the analysis of environmental extreme events. Maximum likelihood estimation of the generalized Pareto distribution has previously been considered in the literature, but we show, using computer simulation, that, unless the sample size is 500 or more, estimators derived by the method of moments or the method of probability-weighted moments are more reliable. We also use computer simulation to assess the accuracy of confidence intervals for the parameters and quantiles of the generalized Pareto distribution. © 1987 Taylor and Francis Group, LLC.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
John S. Lew
Mathematical Biosciences
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering