Conference paper
Nanoscale processing for thin film recording heads
J.A. Katine, R.E. Fontana, et al.
INTERMAG 2003
Patterning damage in narrow trackwidth spin-valve sensors was studied. The resistance of the sensors increased with the width, while the giant magnetoresistance (GMR) ratio decreased with decreasing width. It was found that sensors patterned using a focused Ar ion beam showed a similar but much greater effect.
J.A. Katine, R.E. Fontana, et al.
INTERMAG 2003
L. Folks, R.E. Fontana, et al.
Journal of Physics D: Applied Physics
M.J. Rooks, E. Kratschmer, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.A. Katine, M.K. Ho, et al.
INTERMAG 2003