Conference paper
Extendability of CIP spin-valve sensors to narrow dimensions
J.A. Katine, M.K. Ho, et al.
INTERMAG 2003
Patterning damage in narrow trackwidth spin-valve sensors was studied. The resistance of the sensors increased with the width, while the giant magnetoresistance (GMR) ratio decreased with decreasing width. It was found that sensors patterned using a focused Ar ion beam showed a similar but much greater effect.
J.A. Katine, M.K. Ho, et al.
INTERMAG 2003
Benjamin W. Chui, Timothy D. Stowe, et al.
JMEMS
M.J. Rooks, E. Kratschmer, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
D. Bedau, H. Liu, et al.
Applied Physics Letters