Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Paper
Phenomena produced by ion bombardment in plasma-assisted etching environments
Abstract
The emphasis of this review paper will be to summarize recent experimental results, describe and evaluate contemporary concepts in the etching field, and to provide references to recent work. © 1988, American Vacuum Society. All rights reserved.
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