Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Phenomenological equations for the electrical conductivity of microscopically inhomogeneous materials are proposed. These equations combine ideas from the effective-medium theory and from percolation theory and, for some interesting cases, improve on the effective-medium theory in the vicinity of the percolation threshold. The equations are compared, without adjustable parameters, to three different experimental situations and agree with data remarkably well. © 1976 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Mark W. Dowley
Solid State Communications