K.K. Shih, J. Woodall, et al.
Journal of Applied Physics
Silicon monoxide films (1000-5000 Å thick) are converted to silicon dioxide when irradiated in air with pulses (∼15 n half-width) of 193-nm radiation (40-110 mJ/cm2) from an excimer laser. The quantum efficiency of the process has a minimum value of 0.014.
K.K. Shih, J. Woodall, et al.
Journal of Applied Physics
R. Srinivasan, Bodil Braren
Proceedings of SPIE 1989
S.E. Blum, R.J. Chicotka, et al.
JES
R. Srinivasan, J.A. Ors
Chemical Physics Letters