Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using an STM we have created and investigated individual small particles with apparent lateral dimensions between 10 Å and 250 Å on metal single-crystal surfaces and metallic films. These particles are clearly observed in simultaneous measurements of STM topographs and emission of photons from the tunneling gap. The particles give rise to order-of-magnitude variations in photon intensity with subnanometer lateral resolution. We interpret the observed photon emission characteristics in terms of inelastic tunneling excitation of tip-induced, localized plasmon modes. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting