Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
The synthesis, photothermal patterning and application of photosensitive pentacene precursor in thin-film transistors were studied. The precursor was synthesized using Lewis acid-catalyzed Diels-Alder reaction of pentacene with N-sulfinylmethacrylamide. The thin films of the pentacene precursor were patterned upon exposure to ultraviolet (UV) irradiation. The high temperature annealing of polymerized precursor resulted in the formation of pentacene thin films, which were used to fabricate pentacene thin-film transistors with patterned active channels.
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007