Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The synthesis, photothermal patterning and application of photosensitive pentacene precursor in thin-film transistors were studied. The precursor was synthesized using Lewis acid-catalyzed Diels-Alder reaction of pentacene with N-sulfinylmethacrylamide. The thin films of the pentacene precursor were patterned upon exposure to ultraviolet (UV) irradiation. The high temperature annealing of polymerized precursor resulted in the formation of pentacene thin films, which were used to fabricate pentacene thin-film transistors with patterned active channels.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
H.D. Dulman, R.H. Pantell, et al.
Physical Review B