Paper
Resist materials
Scott A. MacDonald, Jean M.J. Frechet, et al.
Microelectronic Engineering
The problem of synthesizing photosensitive urethanes of the highly sterically hindered 2,2,6,6-tetramethylpiperidine is solved by first preparing the 1-chlorocarbonyl derivative which was shown to react with a series of o-nitrobenzylic alcohols, including 2,6-dinitrobenzyl alcohol. These products are potential photogenerators of this amine. Full characterization is reported, along with a crystal structure. © 1994, American Chemical Society. All rights reserved.
Scott A. MacDonald, Jean M.J. Frechet, et al.
Microelectronic Engineering
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Advanced Materials
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Microelectronic Engineering
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