R. Ghez, M.B. Small
JES
R. Ghez, M.B. Small
JES
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering