Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The poly-2, 8-indenofluorene with three covalently linked benzene rings to ride the gap between the 2, 7-PF containing two planarized benzene units per repeat unit and the fully flattened ladder-poly-prar-penylenes(LPPP) was synthesized. The use of four n-octyl substituents as solubilizer for this class of materials led to the formation of aggregates visible in the ultraviolet (UV) and fluorescence spectra of thin films. This paper reports a way to suppress the aggregation tendency of 2, 8-PIFy copolymerization.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.N. Tu
Materials Science and Engineering: A
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering