P. Alnot, D.J. Auerbach, et al.
Surface Science
This paper reports on the design, fabrication and proof of concept of a multilayer fluidic packaging system enabling an increase in the output power performance of micro thermoelectric generators (μTEGs). The complete integration of the microfluidic heat transfer system (μHTS) with a μTEG is successfully demonstrated. The fabricated prototype is characterized with respect to its thermal and hydrodynamic performance as well as the generated output power. At a very low pumping power of 0.073 mW/cm2, a heat transfer resistance of 0.74 cm2 K/W is reached. The assembled device generated up to 1.47 mW/cm2 at an applied temperature difference of 50 K and a fluid flow rate of 0.1 l/min. Further system improvements and the potential of the proposed packaging approach are discussed. © 2012 Elsevier B.V. All rights reserved.
P. Alnot, D.J. Auerbach, et al.
Surface Science
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Michiel Sprik
Journal of Physics Condensed Matter