Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper explores the connection between semantic equivalences and preorders for concrete sequential processes, represented by means of labeled transition systems, and formats of transition system specifications using Plotkin's structural approach. For several preorders in the linear time-branching time spectrum a format is given, as general as possible, such that this preorder is a precongruence for all operators specifiable in that format. The formats are derived using the modal characterizations of the corresponding preorders.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Raghu Krishnapuram, Krishna Kummamuru
IFSA 2003
Preeti Malakar, Thomas George, et al.
SC 2012
Kaoutar El Maghraoui, Gokul Kandiraju, et al.
WOSP/SIPEW 2010