Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
No abstract available.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering