PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperPressure and plasma effects on the properties of magnetron sputtered carbon filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jul 1987PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsS.M. RossnagelMichael A. RussakJ.J. CuomoIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
