Properties of amorphous diamond films prepared by a filtered cathodic arc

Abstract

Amorphous diamond films have been prepared by filtered cathodic arc deposition of carbon. The filtered arc is well suited for the growth of amorphous diamond, as it provides carbon ions with optimum kinetic energies at practical deposition rates. These films contain no hydrogen and are therefore structurally different from diamond-like carbon films generated by plasma chemical vapor deposition. Diamond-type bonding of carbon is quantitatively determined by electron energy loss spectroscopy, as an sp3 content up to 83% is measured. Data on the macroscopic properties are provided by optical transmittance, ellipsometry, Rutherford backscattering, elastic recoil scattering, and resistivity measurements. The films exhibit high optical transparency and an optical gap of 2.4 eV. Trends in the optical gap and refractive index as a function of deposition energy are consistent with semiconductor theory and indicates a change in the average bond length. © 1995 American Institute of Physics.