B. Oh, R.H. Koch, et al.
Physical Review B
We have fabricated superconducting quantum interference devices (dc SQUID's) from thin films of the superconducting oxide YBa2Cu 3Oy. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 μm loop and two 17-μm-wide weak links over a ∼1-μm-thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID's. The SQUID's were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to be h/2e in these materials.