Radiofrequency discharge benchmark model comparison

Abstract

A well defined basis of comparison for self-consistent simulations of RF discharges is presented. Twelve different simulation efforts including kinetic, hybrid and fluid methods have produced results for a one-dimensional RF discharge simulation using identical cross sections or swarm parameters under specified conditions. In addition, global model predictions are also provided for comparison. The agreement between groups using the particle-in-cell with Monte Carte collisions (PIC-MCC) technique and a hybrid method is good. Differences between PIC-MCC and convective scheme solutions to the Boltzmann equation exist primarily in the electron number density and not energy density. Fluid simulations generally show greater variation in the results than kinetic/hybrid schemes. The differences, which are typically greatest at low pressures, are apparent only in some plasma parameters, such as RF voltage and plasma density, but not in others, such as ion flux to the electrodes. In general, the agreement between global model results and simulation predictions is quite reasonable. These results provide some indication of the sensitivity of the solutions to approximations and numerical techniques used in the various models.