Conference paper
Evaluation of Cu wiring in a production 64 Mb DRAM
W. Cote, G. Costrini, et al.
VLSI Technology 1998
A device is presented that sweeps out programmable optical delays of 300 ps (or less) at 30 Hz, with shorter-delay scans possible at much higher rates. It is compact, vibration-free, linear to within 0.02%, and has a position repeatability of 1 part in 105. With this scanner and a PC-based signal-averaging data acquisition system, ultrafast autocorrelation measurements with very high signal/noise are demonstrated in both the fs and ps domains.
W. Cote, G. Costrini, et al.
VLSI Technology 1998
C.-C. Yang, P. Flaitz, et al.
ADMETA 2010
D. Edelstein, J. Heidenreich, et al.
IEDM 1997
Takeshi Nogami, Tibor Bolom, et al.
IEDM 2010