Conference paper
Copper dual damascene wiring for sub-0.25 μm CMOS technology
J. Heidenreich, D. Edelstein, et al.
IITC 1998
A device is presented that sweeps out programmable optical delays of 300 ps (or less) at 30 Hz, with shorter-delay scans possible at much higher rates. It is compact, vibration-free, linear to within 0.02%, and has a position repeatability of 1 part in 105. With this scanner and a PC-based signal-averaging data acquisition system, ultrafast autocorrelation measurements with very high signal/noise are demonstrated in both the fs and ps domains.
J. Heidenreich, D. Edelstein, et al.
IITC 1998
C.-C. Yang, Fenton R. McFeely, et al.
Electrochemical and Solid-State Letters
S.M. Rossnagel, Robert L. Wisnieff, et al.
IEDM 2005
S.V. Nitta, D. Edelstein, et al.
IITC 2008