O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Reaction of chlorine with Ag surfaces has been studied at 300 K with X-ray photoelectron spectroscopy and Auger depth profiling over a wide range of Cl2 exposures. Formation of AgCl and subsurface diffusion are observed. At exposures lower than 107 L, the Ag-Cl2 reaction is logarithmic in time and the surface layer is Ag enriched. This behavior can be related to a field-assisted diffusion mechanism known from oxidation of metal surfaces. At higher exposures, however, a t1/2 time dependence of the chlorination reaction is found. The Cl penetration saturates, and a stoichiometric AgCl layer is formed on the surface. It is further observed that a solid AgCl can be reduced to metallic Ag in the surface region when bombarded by Ar+ ions. Irradiation by X-ray photons can cause more complex chemical changes on the solid surfaces. © 1987 Elsevier Science Publishers B.V.
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures