Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
A recursive stochastic integral equation for the detection of counting processes is derived from a previously known formula [5] of the likelihood ratio. This is done quite simply by using a result due to Doléans-Dade [4] on the solution of stochastic integral equations. © 1976 Springer-Verlag New York Inc.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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