Conference paper
LPCVD IN-SITU ARSENIC DOPED POLYSILICON FOR VLSI APPLICATIONS.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
No abstract available.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
Marshall I. Nathan
Semiconductor Science and Technology
John E. Smith, James C. McGroddy, et al.
Physical Review
Alwin E. Michel
Nuclear Inst. and Methods in Physics Research, B