Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Results are presented for the second-harmonic generation of light in K1-xLixTaO3 for x=1.6%, 2.6%, 3.4%, and 6%. From the second-harmonic efficiency and from birefringence results, it is concluded that below the freezing temperature Tf, KTaO3
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Digital Discovery
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MRS Fall Meeting 2020
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Surface Review and Letters