D.J. Vitkavage, J.G. Clabes, et al.
JVSTA
No abstract available.
D.J. Vitkavage, J.G. Clabes, et al.
JVSTA
M.J. Goldberg, J.G. Clabes, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J. Warnock, J. Keaty, et al.
IBM J. Res. Dev
Ming L. Yu, Wilhad Reuter
Journal of Applied Physics