Secondary Ion Emission and Sputter Yields from Metal Targets under F2+Bombardment

Paper

01 May 2002

Secondary Ion Emission and Sputter Yields from Metal Targets under F₂⁺Bombardment

No abstract available.

Paper

J.G. Clabes, G.W. Rubloff, et al.

Physical Review B

Paper

Ming L. Yu, Wilhad Reuter

Journal of Applied Physics

Paper

J.G. Clabes, M.J. Goldberg, et al.

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

Ming L. Yu, Wilhad Reuter

Journal of Applied Physics