Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The dielectric function of the electron gas has been calculated in the self-consistent Hartree-Fock approximation. Results are presented and compared with that obtained in random-phase-approximation and Hubbard theories. © 1971 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Proceedings of SPIE 1989
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films