Reactive ion etching processes for amorphous germanium alloys
Y. Kuo
MRS Fall Meeting 1993
Solution-phase chemical syntheses are presented for the fabrication of Ge quantum structures, including O-dimensional dots, 1-dimensional wires, 2-dimensional platelets. The syntheses, which are based on the reduction of chlorogermanes and organochlorogermanes, are carried out in two steps. Step 1, the nucleation step, is done at ambient temperature with a liquid metal reducing agent (NaK) and under the influence of sonication. Step 2, crystallization, is carried out at elevated temperatures and pressures in a sealed bomb. Separation of these two steps is shown to be critical for obtaining size and shape control over the product crystallite.
Y. Kuo
MRS Fall Meeting 1993
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
D.B. Laks, D. Maroudas, et al.
MRS Fall Meeting 1993
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings