Denis Kleyko, Kumudu Geethan Karunaratne, et al.
IEEE TNNLS
High bandwidth, high resolution positioning is a significant enabling tool for nanotechnology. Unfortunately, in a typical nanopositioner operating in closed loop, higher bandwidth results in increased sensitivity to measurement noise and hence reduced resolution. In this article we present a technique that allows high-precision tracking of repetitive, jitter-free reference signals without being constrained by the reduction in measurement noise induced positioning resolution. The technique works exceptionally well for scanners with high enough open loop bandwidth and in the absence of high frequency external disturbances. Both simulation and experimental results are presented to illustrate this concept using a triangular reference signal. © 2009 The American Physical Society.
Denis Kleyko, Kumudu Geethan Karunaratne, et al.
IEEE TNNLS
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