Silicon Micro Mechanics (SIMM): Si-beams with rectangular cross-section for atomic force sensing by means of STM

S.F. Fan, W.B. Yun, et al.

Proceedings of SPIE 1989

R.J. Gambino, N.R. Stemple, et al.

Journal of Physics and Chemistry of Solids

U. Wieser, U. Kunze, et al.

Physica E: Low-Dimensional Systems and Nanostructures

O.F. Schirmer, K.W. Blazey, et al.

Physical Review B