Chemical vapor deposition of copper alloys
C. Smart, S.K. Reynolds, et al.
MRS Proceedings 1992
An improved five-wavelength interferometer with high-speed shutters in the light path was designed and implemented. The interferometer allows switching between two sets of three wavelengths, keeping one wavelength in each measurement in common. The set-up allows nearly simultaneous acquisition of fringe intensities and can be used to measure the head/tape spacing in a moving linear tape drive. The precision of the new five-wavelength interferometer was investigated and was found to be superior to the precision obtained with a three-wavelength interferometer.
C. Smart, S.K. Reynolds, et al.
MRS Proceedings 1992
Shinnosuke Tanaka, Carol Mak, et al.
ACL 2024
F.M. D'Heurle
Metallurgical and Materials Transactions B
Flaviano Della Pia, Andrea Zen, et al.
Journal of Chemical Physics