Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Transport properties of a single YBaCuO grain boundary have been investigated with a spatial resolution of 1 μm for voltages up to 70 meV. The conductance versus voltage characteristic is found to increase linearly for voltages between 6 and 40 mV. Below 2 mV this characteristic shows periodic oscillations. The origin of these features is discussed. © 1990.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Alnot, D.J. Auerbach, et al.
Surface Science
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989