P. Chaudhari, A.N. Broers, et al.
Physical Review Letters
Multilayer cobalt - carbon mirrors on Si(111) substrates were made by electron-beam deposition and polishing of the metal layers by Kr+ ion bombardment. A new spectroscopic method was developed for estimating the parameters of plane multilayer x-ray mirrors by illuminating a sample with broad-band radiation from a laser-plasma source and by subsequent dispersion of this radiation with a diffraction grating operating in the transmission mode.
P. Chaudhari, A.N. Broers, et al.
Physical Review Letters
H.J. Voorma, E. Louis, et al.
Journal of Applied Physics
E. Spiller, R.A. McCorkle, et al.
Optical and Optoelectronic Applied Science and Engineering 1990
R.J. Bartlett, D.R. Kania, et al.
Proceedings of SPIE 1989