Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Conference paper

10 Dec 2003

Statistical limitations of printing 50 and 80 nm contact holes by EUV lithography

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Abstract

No abstract available.

Paper

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Digital Discovery

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Scanning tunneling microscopy and spectroscopy of thin metal films on the GaAs(110) surface

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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