Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
It is shown by means of example that for each n > 3, there is a minimal n-state stochastic automaton whose output behavior is a word function of rank 3. Thus, there are stochastic word functions whose natural representation may be quite unwieldy, but whose values nevertheless can be computed in a rapid, compact fashion. © 1986.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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ISIT 2007
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