Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A structure analysis of the Si(111)2 1 surface is performed using extensive new low-energy electron-diffraction data (12 beams). Although the -bonded chain model in its original form shows gross disagreement with low-energy electron diffraction, a modification of that structure gives moderate agreement. The major modifications are a buckling in the outer chain and an overall compression. © 1984 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
R.W. Gammon, E. Courtens, et al.
Physical Review B
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Physica B: Physics of Condensed Matter