Structure of the Si(111)/CaF2 interface

The structure of the Si(111)-CaF2 interface has been determined with medium-energy ion scattering and high-resolution transmission electron microscopy. The interface structure is closely related to the bulk crystal structure of CaSi2. The interface is deficient in F, resulting in Si-Ca bonding and a charge-neutral interface. © 1989, American Vacuum Society. All rights reserved.