R.E. Walkup, Ph. Avouris, et al.
MRS Symposium 1983
Paper
Studies of excimer laser ablation of solids using a Michelson interferometer
Abstract
A Michelson interferometer has been used as a direct quantitative probe for gas phase plasma formation in the UV excimer laser ablation of solids. Excimer laser fluence thresholds for plasma formation are determined and correlated with optical emission from electronically excited ablation fragments.
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