E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
J. Tersoff
Applied Surface Science
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta