Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si

Paper

01 Jan 1985

Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si

No abstract available.

Review

David B. Mitzi

Journal of Materials Chemistry

Paper

Sang-Min Park, Mark P. Stoykovich, et al.

Advanced Materials

Paper

Ellen J. Yoffa, David Adler

Physical Review B

Conference paper

William Hinsberg, Joy Cheng, et al.

SPIE Advanced Lithography 2010