Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
01 Jul 1987

Surface characterization of clean polyimide films by high-resolution electron energy-loss spectroscopy

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Abstract

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Date

01 Jul 1987

Publication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Authors

  • T.C. Clarke
  • C. Gregoire
  • P.A. Thiry
  • R. Caudano
IBM-affiliated at time of publication

Topics

  • Physical Sciences
  • Materials Discovery

Resources

  • Publication

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