Conference paper
Silicon oxidation during bilayer resist etching
Mark A. Hartney, Justin N. Chiang, et al.
Proceedings of SPIE 1989
The relative rates of varying Nb/Nb-TBE monomer feed ratios were evaluated by using real-time monitoring via in-situ FTIR spectroscopy of alternating copolymerizations of MA with Nb and Nb-TBE. Pseudo first order kinetic plots constructed from the in-situ FTIR absorbance data indicated that the rate of reaction is a strong function of the Nb/Nb-TBE ratio and decreased with increasing Nb-TBE.
Mark A. Hartney, Justin N. Chiang, et al.
Proceedings of SPIE 1989
Narayan Sundararajan, Christopher F. Keimel, et al.
J. Photopolym. Sci. Tech.
Anthony J. Pasquale, Timothy E. Long, et al.
Journal of Adhesion
Robert D. Allen, Phillip J. Brock, et al.
J. Photopolym. Sci. Tech.