William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Alnot, D.J. Auerbach, et al.
Surface Science
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Sung Ho Kim, Oun-Ho Park, et al.
Small