Conference paper
Spin-on organic hardmask for topo-patterned substrate
Kazuhiko Komura, Yoshi Hishiro, et al.
SPIE Advanced Lithography 2014
Functionalized cyclic carbonate monomers were synthesized via a two step route featuring a novel cyclic carbonate intermediate possessing a pendent activated pentafluorophenyl carbonate group (MTC-PFPC). The pentafluorophenyl carbonate of MTC-PFPC was selectively substituted with suitable nucleophiles such as alcohols, amines and thiols generating functionalized cyclic carbonates in moderate to high yield. © 2014 The Royal Society of Chemistry.
Kazuhiko Komura, Yoshi Hishiro, et al.
SPIE Advanced Lithography 2014
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