Synthesis of polyester graft copolymers via the macromonomer technique: Application of near-IR spectroscopy as a process monitor

R.D. Allen, Willard E. Conley, et al.

Microlithography 1992

R.D. Allen, G.M. Wallraff, et al.

IBM J. Res. Dev

Ratnam Sooriyakumaran, Debra Fenzel-Alexander, et al.

Proceedings of SPIE - The International Society for Optical Engineering

B. Reck, R.D. Allen, et al.

SPE Regional Technical Conference 1988