Conference paper
Hardmask technology for sub-100 nm lithographic imaging
Katherina Babich, Arpan P. Mahorowala, et al.
Microlithography 2003
Katherina Babich, Arpan P. Mahorowala, et al.
Microlithography 2003
David R. Medeiros
J. Photopolym. Sci. Tech.
Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008
Dario L. Goldfarb, Libor Vyklicky, et al.
J. Photopolym. Sci. Tech.