Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008
Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008
David R. Medeiros, Wayne M. Moreau, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Sean D. Burns, David R. Medeiros, et al.
Proceedings of SPIE-The International Society for Optical Engineering
David R. Medeiros
J. Photopolym. Sci. Tech.