Hiroshi Ito, Hoa D. Truong, et al.
J. Photopolym. Sci. Tech.
Hiroshi Ito, Hoa D. Truong, et al.
J. Photopolym. Sci. Tech.
Katherina Babich, Arpan P. Mahorowala, et al.
Microlithography 2003
David R. Medeiros
J. Photopolym. Sci. Tech.
Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008