A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
A approach to the generation of nanoporous materials using star-shaped amphiphilic copolymers that organize the organosilicate vitrificate into nanostructures was discussed. The amphiphilic copolymers were dissolved in a solution containing methyl silsesquioxane (MSSQ) prepolymer in propylene glycol monomethyl ether, and the resulting solution was spun on a silicon wafer to produce thin films that were cured to 430°C to effect network formation. It was found that a two-phase structure was clearly evident even for the low temperature cure where the MSSQ exists as a prepolymer. The results show that porous morphology was strongly dependent on the arm number, molecular weight of the interior core.
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007