Tester-based methods to enhance spatial resolvability and interpretation of time-integrated and time-resolved emission measurements

Abstract

In this paper, we discuss the use of a tester-based methodology to enhance the spatial resolvability and interpretation of time-integrated and time-resolved emission measurements. This technique, first presented at [1] for chip diagnostics and failure localization, is very powerful for extending the capability of modern analytical tools beyond the limits of existing optics and detectors. In particular, we will discuss how the proposed method works and present several test cases for both static and dynamic emission measurements that allow signals from gates 150 nm apart to be resolved. Copyright © 2013 ASM International® All rights reserved.