William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Computer simulation of fracture dynamics of solid materials was carried out by means of molecular dynamic computations. The work involved a study of crystal imperfections, strain, elastic deformation, transonic and supersonic crack motion and a dynamic brittle-to-ductile transition. A method which used quantum mechanical approach coupled with molecular dynamics was presented to simulate the tight-binding dynamics at the crack tip.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Gangulee, F.M. D'Heurle
Thin Solid Films
T.N. Morgan
Semiconductor Science and Technology
P. Alnot, D.J. Auerbach, et al.
Surface Science