Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
The capacity of future high-density magnetic recording systems is expected to be limited primarily by "jitter". For such systems, a new simple channel model is proposed. A factor graph representation as well as upper and lower bounds on the capacity of this channel model are given.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Imran Nasim, Melanie Weber
SCML 2024
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003