Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
The exposure of a polycrystalline tungsten surface to atomic nitrogen or bombardment by N2+ is shown to enhance chemisorption. Ion bombardment causes the saturation coverage to be increased by about 50 % over that found after exposure to the molecular gas. A somewhat greater saturation coverage is obtained by exposure to neutral atomic nitrogen. The additional gas found in these experiments is desorbed at lower temperatures than nitrogen chemisorbed in β sites. These results are interpreted on the basis of chemisorption at endothermic adsorption sites. © 1971.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Ming L. Yu
Physical Review B