Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The exposure of a polycrystalline tungsten surface to atomic nitrogen or bombardment by N2+ is shown to enhance chemisorption. Ion bombardment causes the saturation coverage to be increased by about 50 % over that found after exposure to the molecular gas. A somewhat greater saturation coverage is obtained by exposure to neutral atomic nitrogen. The additional gas found in these experiments is desorbed at lower temperatures than nitrogen chemisorbed in β sites. These results are interpreted on the basis of chemisorption at endothermic adsorption sites. © 1971.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frank Stem
C R C Critical Reviews in Solid State Sciences
J. Tersoff
Applied Surface Science
M.A. Lutz, R.M. Feenstra, et al.
Surface Science