Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Pradip Bose
VTS 1998
David A. Selby
IBM J. Res. Dev
Oliver Bodemer
IBM J. Res. Dev